Electromagnetic Characterization of Broadband MEMS Antenna
نویسندگان
چکیده
A broadband MEMS steerable antenna is fabricated on a silicon substrate using bulk micromachining techniques. The MEMS platform utilizes torsion hinges and is capable of rotation around two axes for full beam steering capabilities. The antenna was designed using the Ansoft High Frequency Structure Simulator (HFSS) package and operates between 10-16 GHz with a coplanar feedline routed across the MEMS platform hinges. The MEMS antenna performance was mechanically characterized and the results show the platform capable of rotations of 9.16° before failure. The scattering parameters were measured using a Vector Network Analyzer and shown to be in good agreement with the simulation results even when the platform is rotated.
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